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PLASMA SYSTEMS

   
 

[ PRODUCTION OF SPECIAL PLASMA SYSTEMS ]

   
  We build the plasma systems according to your needs. It is necessary to consider the following points:
  • sample size
  • expected output and yield
 
 

Special plasma systems:

 
 
 

Special plasma system Tetra-100-LF-PC:

  The production plasma system Tetra-100 with 100 litres chamber volume, PC control and fully automatic door is mainly used for serial production (cleaning, etching and activation). Some features of Tetra-100:

Type: Plasma etcher Tetra-100-LF-PC with automatic door:
 
 
  Technical Data:
Plasma etcher Tetra-100-LF-PC

switchgear cabinet :
W 2000 mm, H 2200 mm, D 2000 mm
chamber:
W 700 mm, H 200 mm, D 700 mm
chamber volume :
approx. 100 litres
gas supply:
3 gas channels through MFCs
generator:
1 piece (40kHz)
(otional: 13.56 MHz o. 2.45 GHz)
control:
PC control (Windows)
automation:
The system has a drawer door

options / accessories

 
Plasma cleaner - Plasma system TETRA-100-LF-PC - with PC control. The system has a drawer door - Plasma sterilisation

TETRA-100-LF-PC:
with PC control. The system has a drawer door.
 
 
 
 
 

Special plasma system Tetra-120-LF-PC:

  The production plasma system Tetra-120 with 120 litres chamber volume, PC control and fully automatic door is mainly used for serial production (cleaning, etching and activation). Some features of Tetra-120:

Type: Plasma etcher Tetra-120-LF-PC with automatic door:
 
 
  Technical Data:
Plasma etcher Tetra 120-LF-PC

switchgear cabinet:
W 600 mm, H 2.150 mm, D 1.000 mm
chamber:
W 1.200 mm, H 150 mm, D 1.700 mm
chamber volume:
approx. 120 litres
gas supply:
4 gas channels through MFCs
generator:
2 pcs. (each 40kHz)
(optional: 13.56 MHz or 2.45 GHz)
control:
PC control (Windows) with industrial-fieldbus
automation:
The system has a fully automatic door

options / accessories

 
Plasma system TETRA-120-LF-PC - with PC control. The system has a fully automatic door - Plasma sterilisation

Plasma system TETRA-120-LF-PC: with PC control.
The system has a fully automatic door.
 
 
 

Special plasma system Tetra-140-LF-PC:

  The production plasma system Tetra-140 with 140 litres chamber volume, PC control and fully automatic door is mainly used for serial production (cleaning, etching and activation). Some features of Tetra-140:

Type: Plasma etcher Tetra-140-LF-PC:
 
 
 

Technical Data:
Plasma etcher Tetra-140-LF-PC

switchgear cabinet :
W 1.000 mm, H 1.800 mm, D 1.000 mm
chamber:
W 1.000 mm, H 100 mm, D 1.400 mm
chamber volume:
approx. 140 litres
gas supply:
2 gas channels through MFCs, liquid monomer metering for plasma polymerisation
generator:
1 piece (each 40kHz)
(optional: 13.56 MHz o. 2.45 GHz)
control:
PC control (Windows)

options / accessories

 
Plasma cleaner Plasma system TETRA-140-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.

TETRA-140-LF-PC
with PC control.
 
 
 
 
 

Special plasma system Tetra-240-LF-PC:

 

The production plasma system Tetra-240 with 240 litres chamber volume, PC control and fully automatic door is mainly used for serial production (cleaning, etching and activation). Some features of Tetra-240:

Type: Plasma etcher Tetra-240-LF-PC

 
 
 

Technical Data:
Plasma etcher Tetra-240-LF-PC

switchgear cabinet:
W 600 mm, H 1700 mm, D 3200 mm
chamber:
W 305 mm, H 300 mm, D 2600 mm
chamber volume:
approx. 240 litres
gas supply:
3 gas channels through MFCs
generator:
1 piece (40kHz)
(optional: 13.56 MHz o. 2.45 GHz)
control:
PC control (Windows)

options / accessories

 
Plasma cleaner Plasma system TETRA-240-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.

TETRA-240-LF-PC
with PC control.
 
 
 
 
 

Special plasma system Tetra-375-LF-PC:

 

The production plasma system Tetra-375 with 375 litres chamber volume, PC control and fully automatic door is mainly used for serial production (cleaning, etching and activation). Some features of Tetra-375:

Type: Plasma etcher Tetra-375-LF-PC

 
 
 

Technical Data:
Plasma etcher Tetra-375-LF-PC

switchgear cabinet:
W 600 mm, H 2.100 mm, D 800 mm
chamber:
W 600 mm, H 360 mm, D 1.900 mm
chamber volume:
approx. 375 litres
gas supply:
2 gas channels through MFCs
generator:
2 pcs. (each 40kHz)
(optional: 13.56 MHz o. 2.45 GHz)
control:
PC control (Windows)

options / accessories

 
Plasma cleaner Plasma system TETRA-375-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.

TETRA-375-LF-PC with PC control
 
 
 
 
 

Special plasma system Tetra-400-LF-PC:

 

The production plasma system Tetra-400 with 400 litres chamber volume, PC control and fully automatic sliding door is mainly used for serial production (cleaning, etching and activation).

Type: Plasma etcher Tetra-400-LF-PC with automatic sliding door:

 
 
 

Technical data:
Plasma etcher Tetra-400-LF-PC

Switchgear cabinet:
W 600 mm, H 2.100 mm, D 650 mm
Chamber:
W 915 mm, H 750 mm, d 725 mm
Chamber volume:
approx. 400 itres
Gas supply:
3 gas channels through MFCs
Generator:
2 pcs. (each 40kHz)
(Optional: 13,56 MHz or 2,45 GHz)
Control:
PC-control (Windows)
automation:
The system has a fully automatic sliding door

options / accessories

 
The special system plasma cleaner TETRA-400-LF-PC has a automatical sliding door. Plasma cleaner Plasma system TETRA-400-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.

Plasma system TETRA-400-LF-PC with PC-control
 
  The special system plasma cleaner TETRA-400-LF-PC has a automatical sliding door. Plasma cleaner Plasma system TETRA-400-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.
 
  The special plasma system TETRA-400-LF-PC has an automatic sliding door.
 
 
 
 
 

Special plasma system Tetra-420-LF-PC:

 

The production plasma system Tetra-420 with 420 litres chamber volume, PC control and fully automatic sliding door is mainly used for serial production (cleaning, etching and activation).

Type: Plasma etcher Tetra-420-LF-PC

 
 
 

Technical Data:
Plasma etcher Tetra-420-LF-PC

switchgear cabinet :
W 1.600 mm, H 2.100 mm, D 1.200 mm
chamber:
W 750 mm, H 800 mm, D 750 mm
chamber volume:
approx. 420 litres
gas supply:
4 gas channels through MFCs
generator:
4 pcs. (each 40kHz)
(optional: 13.56 MHz o. 2.45 GHz)
control:
PC control (Windows)

options / accessories

 
The special system plasma cleaner TETRA-420-LF-PC has a automatical sliding door. Plasma cleaner Plasma system TETRA-420-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.

TETRA-420-LF-PC
 
  The special system plasma cleaner TETRA-420-LF-PC has a automatical sliding door. Plasma cleaner Plasma system TETRA-420-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.
 
  PCB tray
 
 
 
 
 

Special system Tetra-500-LF-PC:

 

The production plasma system Tetra-500 with 500 litres chamber volume, PC control and fully automatic sliding door is mainly used for serial production (cleaning, etching and activation).

Type: Plasma etcher Tetra-500-LF-PC / roll to roll:

 
 
 

Technical Data:
Plasma etcher Tetra-500-LF-PC

switchgear cabinet:
W 600 mm, H 2.100 mm, D 800 mm
chamber:
W 1.500 mm, H 1.700 mm, D 200 mm
chamber volume :
approx. 500 litres
gas supply:
3 gas channels through MFCs
generator:
2 pcs. (each 40 kHz)
(optional: 13.56 MHz o. 2.45 GHz)
trays:
2 rolle to rolle systeme
control:
PC control(Windows)

options / accessories

 

The special system plasma cleaner TETRA-500-LF-PC has a automatical sliding door. Plasma cleaner Plasma system TETRA-500-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.

TETRA-500-LF-PC /
rolle to rolle system:
with PC control.

 

 

The special system plasma cleaner TETRA-500-LF-PC has a automatical sliding door. Plasma cleaner Plasma system TETRA-500-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.

roll to roll system: inside

The special system plasma cleaner TETRA-500-LF-PC has a automatical sliding door. Plasma cleaner Plasma system TETRA-500-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.

Tetra-500-LF-PC /
roll to roll system:
side

 
   
 
 
 

Special plasma system Tetra-600-LF-PC version 1:

 

The production plasma system Tetra-600 with 600 litres chamber volume, PC control is mainly used for serial production (cleaning, etching and activation).


Type: Plasma etcher Tetra-600-LF-PC:

 
 
 

Technical Data:
Plasma etcher Tetra-600-LF-PC

switchgear cabinet :
W 600 mm, H 2.200 mm, D 800 mm
chamber:
W 1.000 mm, H 1.000 mm, D 600 mm
chamber volume:
approx. 600 litres
generator:
2 pcs. (each 40 kHz)
(optional: 13.56 MHZ o. 2.45 MHz)
trays:
up to 10 trays
control:
PC control (Windows) with
industrial fieldbus

options / accessories

 

 

 

The special system plasma cleaner TETRA-600-LF-PC with upon to 10 trays. Plasma cleaner Plasma system TETRA-600-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.

TETRA-600-LF-PC: with trays,closed

The special system plasma cleaner TETRA-600-LF-PC with upon to 10 trays. Plasma cleaner Plasma system TETRA-600-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.


TETRA-600-LF-PC: with trays, open

 
   
 
 
 

Special plasma system Tetra-600-LF-PC version 2:

 

The production plasma system Tetra-600 with 600 litres chamber volume, PC control is mainly used for serial production (cleaning, etching and activation).

Type: Plasma etcher Tetra-600-LF-PC:

 
 
 

Technical Data:
Plasma etcher Tetra-600-LF-PC

switchgear cabinet :
W 1.800 mm, H 1.800 mm, D 800 mm
chamber:
W 580 mm, H 730 mm, D 1.000 mm
door with 2 glasses
chamber volume:
approx. 600 litres
generator:
1 pc. 40 kHz, automatic matching
gas supply:
2 gas channels through MFC
control:
PC control (Windows) with industrial fieldbus

options / accessories

 

 

 

The special system plasma cleaner TETRA-600-LF-PC. Plasma cleaner Plasma system TETRA-600-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.

TETRA-600-LF-PC: with tray, closed

The special system plasma cleaner TETRA-600-LF-PC with upon to 10 trays. Plasma cleaner Plasma system TETRA-600-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.


TETRA-600-LF-PC:with tray, open

 
   
 
 
 

Special plasma system Tetra-600-LF-PC with rotary drum version 1:

 

The production plasma system Tetra-600 with 600 litres chamber volume, rotary drum and PC control is mainly used for serial production (cleaning, etching and activation).

Type: Plasma etcher Tetra-600-LF-PC with rotary drum:

 
 
 

Technical Data:
Plasma etcher Tetra-600-LF-PC

switchgear cabinet :
W 600 mm, H 2.200 mm, D 800 mm
chamber:
W 1.100 mm, H 1.100 mm, D 700 mm
chamber volume:
approx. 600 litres
generator:
2 pcs. (each 40 kHz)
(optional: 13.56 MHz o. 2.45 GHz)
trays:
rotary drum (with 4 trays each
30 litres)
control:
PC control (Windows)
with industrial fieldbus

options / accessories

 

 

 

The special system plasma cleaner TETRA-600-LF-PC with rotary drum. Plasma cleaner Plasma system TETRA-600-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.

TETRA-600-LF-PC: with rotary drum, closed

The special system plasma cleaner TETRA-600-LF-PC with rotary drum. Plasma cleaner Plasma system TETRA-600-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.


TETRA-600-LF-PC: with rotary drum, open

 
   
 
 
 

Special plasma system Tetra-600-LF-PC with rotary drum version 2:

 

The production plasma system Tetra-600 with 600 litres chamber volume, rotary drum and PC control is mainly used for serial production (cleaning, etching and activation).

Type: Plasma etcher Tetra-600-LF-PC with rotary drum:

 
 
 

Technical Data:
Plasma etcher Tetra-600-LF-PC

switchgear cabinet :
W 1.000 mm, H 2.200 mm, D 1.800 mm
chamber:
W 750 mm, H 1.000 mm, D 750 mm
door with two glasses
chamber volume:
approx. 600 litres
generator:
4 pcs. (each 40 kHz)
automatc matching
gas supply:
2 gas channels through MFC
control:
PC control (Windows)
with industrial fieldbus

options / accessories

 

 

 

The special system plasma cleaner TETRA-600-LF-PC with rotary drum. Plasma cleaner Plasma system TETRA-600-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.

TETRA-600-LF-PC: with rotary drum, closed

The special system plasma cleaner TETRA-600-LF-PC with rotary drum. Plasma cleaner Plasma system TETRA-600-LF-PC with PC control. - Plasma cleaner for activation - cleaning - etching - coating.


TETRA-600-LF-PC: with rotary drum, open

 
   
 
 
 

Special plasma system Tetra-2.000-LF-PC

 

The production plasma system Tetra-2000 with 2000 litres chamber volume, rotary drum and PC control is mainly used for serial production (cleaning, etching and activation).

Type: Plasma etcher Tetra-2.000-LF-PC

 
 
 

Technical Data:
Plasma etcher Tetra-2.000-LF-PC

chamber:
W 1.000 mm, H 2.000 mm, D 1.000 mm
chamber volume:
approx. 2.000 litres
generator:
1 piece (13.56 MHz)
trays:
filling with trays (see third picture)
control:
PC control (Windows) with industrial fieldbus

options / accessories

 

 

 

Tray for the special system plasma etcher TETRA-2000-LF-PC. Plasma etcher Plasma system TETRA-2000-LF-PC with PC control. - Plasma etcher for activation - cleaning - etching - coating.

Tray for the vacuum chamber of the plasma system

 

 

The special system plasma etcher TETRA-2000-LF-PC. Plasma cleaner Plasma system TETRA-2000-LF-PC with PC control. - Plasma etcher for activation - cleaning - etching - coating.

Tetra-2.000-LF-PC: for cleaning and activation of plastics before panting.

The special system plasma etcher TETRA-2000-LF-PC. Plasma etcher Plasma system TETRA-2000-LF-PC with PC control. - Plasma etcher for activation - cleaning - etching - coating.


The special system plasma etcher TETRA-2000-LF-PC. Plasma etcher Plasma system TETRA-2000-LF-PC with PC control. - Plasma etcher for activation - cleaning - etching - coating.

Tetra-2.000-LF-PC chamber

 
   
 
 
 

Special plasma system Tetra-2400-LF-PC:

 

The production plasma system Tetra-2400 with 2400 litres chamber volume and PC-control is mainly used for serial production (cleaning and activation).
Some features of Tetra-2400:

 
 
 

Technical Data:
Plasma etcher Tetra-2400-LF-PC

switchgear cabinet:
W 600 mm, H 2,200 mm, D 800 mm
chamber:
Ø 1,100 mm, H 1,100, D 1,100 mm
chamber volume:
approx. 2400 litres
generator:
4 pcs. (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
trays:
rotary drum (with 16 baskets each 30 litres volume)
control:
PC control (Windows) with industrial field bus

options / accessories

 

 

The special system plasma etcher TETRA-2400-LF-PC. Plasma asher Plasma system TETRA-2400-LF-PC with PC control. - Plasma asher for activation - cleaning - etching - coating.

Plasma system TETRA-2400-LF-PC for production:
Cleaning, activation and etching

 


 

 
   
 
 
 

Special plasma system Tetra-2800-LF:

 

The production plasma system Tetra-2800 with 2800 litres chamber volume and PC-control is mainly used for serial production (cleaning and activation).
Some features of Tetra-2800:

Type: Plasma etcher Tetra-2800-LF

 
 
 

Technical Data:
Plasma etcher Tetra-2800-LF

switchgear cabinet :
W 600 mm, H 1700 mm, D 800 mm
chamber:
Ø 1200 mm, D 2500 mm
chamber volume:
approx. 2800 litres
gas supply:
3 gas channles through MFCs
generator:
1 piece (40kHz)
(optional: 13.56 MHz o. 2.45 GHz)

options / accessories

 

 

The special system plasma etcher TETRA-2800-LF-PC. Plasma asher Plasma system TETRA-2800-LF-PC with PC control. - Plasma asher for activation - cleaning - etching - coating.

TETRA-2800-LF

 


 

 
   
 
 
 

Special plasma system Tetra-4400-LF-PC:

 

The production plasma system Tetra-4400 with 4400 litres chamber volume and PC-control is mainly used for serial production (cleaning and activation).
Some features of Tetra-4400:

Type: Plasma etcher Tetra-4400-LF-PC

 
 
 

Technical Data:
Plasma etcher
Tetra-4400-LF-PC

switchgear cabinet:
W 1800 mm, H 1000 mm, D 800 mm
chamber :
W 1350 mm, D 1250 mm,
H 2600 mm
chamber volume:
approx. 4400 litres
gas supply:
3 gas supply through MFCs
generator:
radiofrequency input:
4 pcs. (40kHz)
control:
PC control(Windows)
Features:
oxygen generator
Plasma-exhaust cleaning for r roots pumps

options / accessories

 

 

The special system plasma etcher TETRA-4400-LF-PC. Plasma asher Plasma system TETRA-4400-LF-PC with PC control. - Plasma asher for activation - cleaning - etching - coating.

TETRA-LF-PC 4400

The special system plasma etcher TETRA-4400-LF-PC. Plasma asher Plasma system TETRA-4400-LF-PC with PC control. - Plasma asher for activation - cleaning - etching - coating.

 
   
 
 
 

Special plasma system Tetra-5600-LF-PC:

 

The production plasma system Tetra-5600 with 5600 litres chamber volume and PC-control is mainly used for serial production (cleaning and activation).
Some features of Tetra-5600:

Tray: Plasma etcher Tetra-5.600-LF-PC:

 
 
 

Technical Data:
Plasma etcher Tetra-5600-LF-PC

Switchgear cabinet :
W 1.800 mm, H 2.200 mm, D 1.800 mm
Chamber:
W 1.500 mm, H 2.000 mm, D 2.500 mm
chamber volume:
approx. 5.600 litres
gas supply:
3 gas channels through MFCs
generator:
6 pcs. (each 40 kHz)
(optional: 13.56 MHZ o. 2.45 MHz)
Trays:
To charge the chamber, carriages are used
control:
PC control (Windows)

options / accessories

 

 

Plasmaanlage TETRA-600-LF-PC: Mit Warenträgern, geschlossen - Plasma Asher

TETRA-5600-LF-PC: with trays, closed

Plasmaanlage TETRA-600-LF-PC: Mit Warenträgern, geöffnet - Plasma Cleaner

TETRA-5600-LF-PC: with trays, open

 
   
 
 
 

Special plasma system Tetra-7500-LF-PC:

 

The production plasma system Tetra-7500 with 7500 litres chamber volume and PC-control is mainly used for serial production (cleaning and activation).
Some features of Tetra-7500:

Type: Plasma etcher Tetra-7500-LF-PC

 
 
 

Technical Data:
Plasma etcher
Tetra-7500-LF-PC

switchgear cabinet :
W 3000 mm, H 2000 mm, D 1000 mm
chamber:
L 2250 mm, D 1000 mm, H 2450 mm
chamber volume:
approx. 7500 litres
gas supply:
2 gas channels throughMFCs
generator:
1 pc. (40kHz)
(optional: 13.56 MHz o. 2.45 GHz)
control:
PC control (Windows)

options / accessories

 

 

The special system plasma etcher TETRA-7500-LF-PC. Plasma asher Plasma system TETRA-7500-LF-PC with PC control. - Plasma asher for activation - cleaning - etching - coating.

TETRA-LF-PC 7500

 

 
   
 
 
 

Special plasma system Tetra-12.600-LF-PC

 

The production plasma system Tetra-12.600 with 12.600 litres chamber volume, and PC-control is mainly used for serial production (cleaning and activation).

Some features of Tetra-12.600:

 
 
 

Technical data:
Plasma etcher Tetra-12.600-LF-PC

chamber:
W 2,400 mm, H 2,100 mm, D 2,500 mm
chamber volume:
approx. 12,600 litres
generator:
6 pcs. (each 40 kHz)
(optional: 13.56 MHz or 2.45 GHz)
trays:
To charge the chamber, carriages are used(see below)
control:
PC control (Windows) with industrial fieldbus

options / accessories

 

Plasma in Tetra-12.600-LF-PC - plasma system

Plasma in Tetra-12.600-LF-PC: Activation of plastic parts

 

 

Plasma system Tetra-12.600-LF-PC: For cleaning and activation of plastics parts before painting

Plasma system Tetra-12.600-LF-PC here: For cleaning and activation of plastics parts before painting

 

Plasma system Tetra-12.600-LF-PC: carriages for filling the machine

 

carriages for filling the plasma system

To charge the chamber, carriages are used

 
   
 
   
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