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STANDARD PLASMA SYSTEMS

 

[ PLASMA SYSTEM FEMTO PCCE - PLASMA CLEANER]

   
  2 litres laboratory plasma system FEMTO with PCCE control is mainly used for:
  • small scale production
  • analysis (SEM, TEM)
  • medical technology
  • sterilisation
  • research and development
  • archaeology
  • textile treatment
  • semiconductor technology
  • plastic technology

Gain of Femto PCCE is:

  • a good cost/value ratio
  • good entry area in pC control

 

   
 

Technical data:
Femto PCCE

switchgear cabinet:
B 562 mm, H 211 mm, T 420 mm
chamber:
Ø 100 mm, L 280 mm
chamber volume:
ca. 2,8 litre
gas supply:
2 pcs. gas channels through MFC
generator:
40kHz/100W, infinitely
vacuum pump:
Leybold, Typ S1,5 (1,5m³/h)
tray :

1 pc. tray
control:
PC control

options / accessories



 
Plasmaanlage FEMTO PCCE für Prozessentwicklung, Reinigung, Aktivierung, Ätzung in Kleinserie - Plasmasysteme

Plasma system FEMTO PCCE (front) :
Process development, cleaning, activating, etching (small series)
Plasmaanlage FEMTO PCCE für Prozessentwicklung, Reinigung, Aktivierung, Ätzung in Kleinserie - Plasmasysteme
Plasma system FEMTO PCCE (back)



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