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STANDARD PLASMA SYSTEMS

 

[ PLASMA SYSTEM TETRA-150-LF-PC - PLASMA ETCHER ]

   
  The production plasma system TETRA-150-LF-PC with 150 litres chamber volume and PC-control is used in the production for cleaning, etching and activation.
   
  Brochure TETRA (PDF 815 KB)
   
   
 
 

Technical Data:
Plasma etcher TETRA-150-LF-PC

switchgear cabinet:
W 1000 mm, H 2.100 mm, D 1000 mm
chamber:
W 400 mm, D 625 mm, H 600 mm
chamber volume:
approx. 150 litres
gas supply:
max. 2 gas channels through MFC
generator:
40kHz/0-2500 W
(optional: 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type D65B (65 m³/h)
trays:
up to 16 trays
(optional: rotary drum)
control:
PC control (Windows)

options / accessories

 
Plasma system TETRA-150-LF-PC - plasma cleaner

Plasma system TETRA-150-LF-PC for cleaning, activation and etching in production.

rotary drum for TETRA-systems - plasma technology

Sixfold tray and rotary drum for TETRA plasma systems.
   
   
  Please contact us if you have technical questions.
   
   
   
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