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STANDARD PLASMA SYSTEMS

 

[ TETRA-30-LF-PC ]

   
  The small scale system TETRA-30-LF-PC with 30 litres chamber volume is used for production in the domains: cleaning, etching and activation.
   
  Brochure TETRA (PDF 815 KB)
   
   
 
 

Technical Data:

switchgear cabinet:
W 600 mm, H 800 mm, D 650 mm
chamber:
W 305 mm, H 300 mm, L 370 mm
(optional: L 625 mm)
chamber volume:
approx. 34 litres
gas supply:
3 gas channels through MFC
generator:
40kHz/0-1000 W
(optional 13.56 MHz or 2.45 GHz)
vacuum pump:
Leybold, Type D16B (25 m³/h)
trays:
up to 6 trays
(optional: rotary drum)
control:
PC control (Windows)

options / accessories

 
TETRA-30-LF-PC

TETRA-30-LF-PC: With PC-control. Build for production, cleaning, activation, etching.
   
   
   
 

Tetra-30-LF-PC as stand alone machine

   
 
 

Technical Data:

switchgear cabinet:
W 600 mm, H 2.200 mm, D 850 mm
chamber:
W 305 mm, H 300 mm, D 370 mm
(optional: D 625 mm)
chamber volume:
approx. 34 litres
gas supply:
3 gas channels through MFCs
generator:
40kHz/0-1000 W
(optional: 13.56 MHz or 2.45 GHz)
trays:
up to 6 trays
(optional: rotary drum)
control:
PC control (Windows)

options / accessories

 
TETRA-30-LF-PC

TETRA-30-LF-PC: With PC-control. Build for production, cleaning, activation, etching.
   
   
  Please contact us if you have technical questions.
   
   
   
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