diener electronic : Mean free path length


	Mean free path length Average distance a gas molecule passes between two collisions with othergas molecules at a given temperature and pressure. Significant for thegeneration of a plasma: under too high pressure (too short mean freepath), electrons and ions can not build up the necessary speed forionising collisions, under too low pressure (too long mean free path) thenumber of ionising collisions is too small to sustain the plama.Furthermore, the mean free path length has a strong influence on theisotropy of etching processes: the higher the pressure, the shorter thefree path length, the more isotropic is the material removal.

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