diener electronic  |  Plasma-Surface-Technology Plasma Plasma systems Surface-Technology
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 Magazine 
For the treatment in plasma, small parts (e. g. ICs) can be positioned inparticular supports, often comprising several levels, so-calledmagazines. This allows the optimal use of the chamber volume togetherwith a defined position of every treated part. When contact between theparts during the plasma process should be avoided and for mechanicallyvery sensitive parts, the employment of magazines should be preferred tothe rotating drum method. Magazines are also employed to take up leadframes.

   
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